Tetramethylammonium hydroxide pentahydrate, PurReagent, >=97.0%

PurReagent


Synonym:  TMAH
Linear Formula:  C4H23NO6
Molecular Weight:  181.23 g/mol
CAS Number: 10424-65-4

Properties

Vapour pressure 97 mm Hg ( 20 °C)
Water Solubility 2200 g/l
Autoignition temp. 878°F
Explosion limit 36 %
Assay Purity >=97%
M pt. 67-70°C
Density 1.829
Form Solid

Safety Information

Hazard Statement(s) H300 + H310,H314,H370,H372,H411
Precautionary Statement  P260 - P273 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338
GHS Pictogram
Signal word Danger
HS Code 29239000
Storage Temp. Room Temperature
Storage Class 6.1A - Combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials
UN Number NA

Description

Application
Tetramethylammonium hydroxide pentahydrate (TMAH pentahydrate) is mainly used in semiconductor manufacturing photolithography and chemical processing. It is also used as a strong base in laboratory synthesis.

Purpose
It serves primarily as a strong metal-ion-free alkaline reagent particularly for developing photoresists in semiconductor fabrication and for carrying out base-catalyzed reactions.

General Description
Tetramethylammonium hydroxide pentahydrate is the hydrated form of tetramethylammonium hydroxide (TMAH) typically supplied as a white crystalline solid. It is highly alkaline and soluble in water.